| Veranstaltungsform | Vorlesung und Übung |
| Semesterwochenstunden | 3 |
| Turnus | jährlich Wintersemester |
| Lehrende | Gaoliang Dai |
The students have an insight to the traceable dimensional metrology, as well as an introduction to the research frontiers in this field. They will obtain a broad overview to various high accurate dimensional metrology techniques, including length and angle metrology, photo mask metrology, coordinate metrology, form metrology, surface metrolgy and nanometrology. The course will cover almost all kinds of dimension measuring tasks such as position, size, form, roughness, layer thickness etc. with measurement uncertainty down to several nanometres or even below. Focus will be given to metrology systems, transfer artefacts and standards applicable for calibrating dimension measuring devices. In addition, as the most frequently applied techniques, high accurate optical interferometry and the error separation as well as self calibration techniques will also be detailed in this course.