The AFM -Atomic Force Microscope is used to characterize materials and structures with a resolution in the nanometer range. The atomic forces between the sample and a cantilever scanning the sample are used. The deformation/deflection of the cantilever is detected by a laser (beam deflection method). In addition, the cantilever is mounted on a shaker piezo. This excites the cantilever to oscillate close to the resonance frequency. In the dynamic force mode (tapping mode), the distance between the sample and the cantilever is controlled so that the oscillation frequency remains constant. The z-movement can thus be used to infer the topography of the sample, but material properties can also have an influence on the atomic forces between the material and the cantilever and thus change the frequency. In contrast, in static mode the cantilever is in contact with the sample and the deflection of the cantilever is kept constant.
Hersteller
Typ
Scan-Weite in XY
Scan-Weite in Z
Rauschen
Scan-Modes