Laboratory Course Micromechatronics

Course content

Graduates of this module are able to select, describe, plan and compare the structure, function and design of microsensors, microactuators, microfluidic components and microsystems as well as the process-accompanying measurement technology, taking into account microtechnical processing methods. They can analyze a given application need, derive the resulting requirements for the microsystem and determine and describe suitable basic structures and sensor, actuator, and fluidic principles. Furthermore, they are capable of explaining, planning and comparing different methods for the evaluation and electronic processing of sensor signals. By completing the laboratory exercise, students can plan, apply and evaluate the essential development steps of a microsystem. They are able to transfer the knowledge gained in the preceding steps to the subsequent steps and, conversely, to reflect back experiences and thus optimize the design. They are able to apply the methods (design and simulation software, measuring and testing systems) of the respective steps in practice and can summarize and describe the results appropriately.

The module covers the three main topics microsensors, microactuators and microfluidic systems. Microsensors include capacitive, piezoresistive, inductive and resonant sensors, which are manufactured on the basis of various production processes. The manufacturing processes of volume and surface micromechanics are presented. In addition, deep lithography, micro electroplating and soft lithography are explained in more detail. For the further processing of a sensor signal, methods for signal processing are taught. The topic micro-actuator technology includes the description of the functional actuator structure, the explanation of different micro-actuator principles including their special features and modes of operation, their structure and their design. Microfluidic systems are defined and the basic knowledge for this is imparted. Concrete application examples, such as mixers, valves and pumps are described and discussed. Based on lectures and exercises, the development of a MEMS (micro-electro-mechanical system) will be worked out in the laboratory Micromechatronics using the example of a pressure sensor including evaluation electronics. The individual work steps of the system development include • Rough design of the sensor system • Creation of a 3D model of the sensor (SolidWorks) and analysis of the mechanical properties with an FEM program (CosmosWorks) • Characterization of the sensors • Simulation (PSPICE) and design (EAGLE) of the electronic circuit • Structure of the complete system (board etching, assembly) • Testing the sensors with the evaluation electronics Finally, a protocol must be drawn up.