Thin Film Technology

Contents:

• Definitions, layers systems, alloys and compounds
• Growth model: adsorption, lifetime of adsorbed species, sticking coefficients, surface diffusion, chemisorption, nucleation, coalescence, real surfaces, surface passivation, surface energy, film growth modes
• Epitaxy and deposition: layer morphology, texturing, vacuum requirements, convection, diffusion, molecular flow, collision cross section, mean free path
• Evaporation: thermodynamics, evaporation of alloys and compounds
• Molecular beam epitaxy, Knudsen cell
• Sputtering process, ionization mechanisms, RF sputtering, magnetron sputtering, reactive sputtering, ion beam sputtering
• Chemical vapor deposition (CVD): reactions, thermodynamics and kinetics of CVD, different types of CVD: LPCVD, PECVD, MOCVD, ALD
• Electroplating
• Langmuir-Blodget films
• Monitoring and controlling of film deposition processes
• Applications and prospects of thin film technology

Examination: oral

Lecture notes: Copies of the transparancies will be provided during the lecture.

Will be held: each SS

Contact person: apl. Professor Dr. Bakin / N. N.