Semiconductor Sensors

Contents:
micromechanical sensors

• spring mass resonator: periodic excitation, mass, damping coefficient, spring constant, acceleration sensor, noise, vibration sensor, yaw rate sensor, bending stiffness, force sensor, film stress, thermal sensor, membrane, pressure sensor, flow sensor, overload stability, shock sensor
• transducer: pressure sensor-capacitive/optical transducer, acceleration sensor-capacitive/piezoelectric transducer, vibration/acceleration sensor-optical transducer, force/vibration sensor-piezoresistive transducer, fibre-optical read-out, yaw rate sensor- excitation and detection, acceleration sensor-tunneling transducer, comparison and evaluation

micro technology: lithography, clean room technology, micromachining

• surface micromachining: diffusion, thermal oxidation, chemical vapour deposition, wet/dry etching, stiction, integration of MEMS and CMOS

• bulk micromachining: ion implantation, wet isotropic/anisotropic etching, metallization (evaporation/sputtering), electrochemical etching, vibration sensor in bulk micromachining, characterization, acceleration sensor/foundry process
• epi micromachining: epi-poly process, conformal poly silicon deposition, SIMPLE, SCREAM, black silicon, SOI, porous silicon, electropolishing, III/V semiconductors, hetero micromachining, comparison, foundry concept

applications

• condition monitoring: rolling bearing, kinematic frequencies, resonant vibration monitoring, blast furnace: axial blower, fabrics: calender roll, ICE driving unit: axle box bearing, lathe tool: spindle bearing, signal analysis (envelope/resonant), turbine/fluid pump: cavitation
• engine combustion management: efficiency of combustion engines, cylinder loading, pressure indication, heating curve, mean indicated pressure, exhaust gas reflow, sensors
• environmental monitoring: temperature/heat sensor, humidity sensor, cantilever-type sensor, resonant sensor, capacitive sensor, calorimetric sensor, enthalpy sensor, biochemical sensor

Examination: oral

Lecture notes: Copies of the transparancies will be provided during the lecture.

Will be held: each WS

Contact person: apl. Prof. Dr. rer. nat. E. Peiner / N. N.