Semiconductor Technology

Contents: The course is concerned with the fundamentals of the technological fabrication of microelectronic devices and circuits on silicon and III/V compound semiconductors (GaAs, InP and GaN). In particular the following subjects are discussed:

• basic physics
• fabrication of Si and GaAs bulk crystals
• epitaxial crystal growth
• organic semiconductors
• doping techniques
• metal semiconductor contacts
• semiconductor measurement techniques

Examination: oral

Lecture notes: Lecture notes as well as the transparencies are available on Stud.IP.

Will be held: each summer semester in German or each winter semester in English

Contact person: apl. Prof. Dr.-Ing. Hergo-Heinrich Wehmann / N. N.