TU Braunschweig, Institut für Halbleitertechnik
LENA
Langer Kamp 6a (Room 211)
38106 Braunschweig
Tel.: 0531 391-65332
Fax: 0531 391-5844
e.peiner(at)tu-braunschweig.de
Scopus Author ID: 7003588121
Google Scholar
Reseach fields:
- Piezoresistive MEMS cantilever sensors
- Tactile microprobes for surface metrology (form, roughness, visco elasticity)
- MEMS resonant sensors for air-quality monitoring (nano aerosols, exhaust gases)
- Nanowire arrays for energy harvesting and storage
Teaching:
- Electronic Packaging (L)
- Semiconductor Sensors - Basics and Applications (L)
- Semiconductor Metrology (L)
- Basics of Electronics (E)
Funded research projects:
PhD projects:
M. Bertke, G. Hamdana, W. Wu, H. S. Wasisto, E. Uhde, E Peiner, "Analysis of asymmetric resonance response of thermally excited silicon micro-cantilevers for mass-sensitive nanoparticle detection", J. Micromech. Microeng. 27 (2017) 064001 (10pp); doi.org/10.1088/1361-6439/aa6b0d.
G. Hamdana, L. Caccamo, M. Bertke, T. Südkamp, H. Bracht, H. S. Wasisto, E. Peiner, "Enhanced colloidal lithography for fabrication of well-defined-area silicon nanowires", Microelectronic Engineering 179 (2017) 74-82; dx.doi.org/10.1016/j.mee.2017.04.030.
G. Hamdana, M. Bertke, L. Doering, T. Frank, U. Brand, H. S. Wasisto, E. Peiner, "Transferable micromachined piezoresistive force sensor with integrated double-meander spring system", J. Sens. Sens. Syst. 6 (2017) 121–133, doi:10.5194/jsss-6-121-2017.
F. Yu, S. Yao, F. Römer, B. Witzigmann, T. Schimpke, M. Strassburg, A. Bakin, H. Schumacher, E. Peiner, H. S. Wasisto, A. Waag, "GaN nanowire arrays with nonpolar sidewalls for vertically integrated field-effect transistors", Nanotechnology 28 (2017) 095206 (9pp); doi: 10.1088/1361-6528/aa57b6.
L. Doering, U. Brand, S. Bütefisch, T. Ahbe, T. Weimann, E. Peiner, T. Frank, "High-speed microprobe for roughness measurements in high-aspect-ratio microstructures", Meas. Sci. Technol. 28 (2017) 034009 (9pp); doi:10.1088/1361-6501/28/3/034009.
G. Hamdana, H. S. Wasisto, L. Doering, C. Yan, L. Zhou, U. Brand, E. Peiner, "Double meander spring silicon piezoresistive sensors as micro force calibration standards", Opt. Eng. 55(9), 091409 (2016), doi:10.1117/1.OE.55.9.091409, open access.
H. S. Wasisto, E. Uhde, E. Peiner, "Enhanced performance of pocket-sized nanoparticle exposure monitor for healthy indoor environment“, Build. Environ. 95 (2016) 13-20; doi: 10.1016/j.buildenv.2015.09.013.
A. Stranz, A. Waag, E. Peiner, "Investigation of thermoelectric parameters of Bi2Te3 - TEGs assembled using pressure-assisted silver powder sintering-based joining technology”, J. Electron. Mater. 44 (2015) 2055-2060; DOI: 10.1007/s11664-015-3655-2.
PhD thesis/Habilitation thesis/Book chapters:
Jiushuai Xu and Erwin Peiner, "Dimensional-Nanopatterned Piezoresistive Silicon Microcantilever for Environmental Sensing", in "Advanced MEMS/NEMS Fabrication and Sensors", Editor: Dr. Zhuoqing Yang (Springer Nature Switzerland AG, 2022), 19-47; https://link.springer.com/chapter/10.1007%2F978-3-030-79749-2_2.
Jiushuai Xu and Erwin Peiner,
"Resonant Silicon Microcantilevers for Particle and Gas Sensing",
in "Piezoelectric Sensors", Editor: Prof. Dr. Peter Lieberzeit, in Springer Series on Chemical Sensors and Biosensors 18: Methods and Applications, Series Editor: Gerald Urban (Springer Nature Switzerland AG, Cham, Switzerland, 2024), pp. 291-338; https://link.springer.com/chapter/10.1007/5346_2023_33.
Articles in international peer-reviewed journals:
Andi Setiono, Wilson Ombati Nyang’au, Michael Fahrbach, Jiushuai Xu, Maik Bertke, Hutomo Suryo Wasisto, Erwin Peiner, “Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement”, J. Micromech. Microeng. 29 (2019) 124006 (12pp); doi.org/10.1088/1361-6439/ab4e29.
Maik Bertke, Jiushuai Xu, Andi Setiono, Ina Kirsch, Erik Uhde, Erwin Peiner, "Fabrication of a micro-cantilever-based aerosol detector with integrated electrostatic on-chip ultrafine particle separation and collection”, J. Micromech. Microeng. 30 (2020) 014001 (13pp); DOI: 10.1088/1361-6439/ab4e56.
Andi Setiono, Maik Bertke, Wilson Ombati Nyang’au, Jiushuai Xu, Michael Fahrbach, Ina Kirsch, Erik Uhde, Alexander Deutschinger, Ernest J. Fantner, Christian H. Schwalb, Hutomo Suryo Wasisto, Erwin Peiner, “In-plane and out-of-plane MEMS piezoresistive cantilever sensors for nanoparticle mass detection”, Sensors 20(3) (2020) 618 (18pp); https://doi.org/10.3390/s20030618.
Jan K. Prüßing, Tim Böckendorf, Gerry Hamdana, Erwin Peiner, Hartmut Bracht, “Defect distribution in boron doped silicon nanostructures characterized by means of scanning spreading resistance microscopy”, J. Appl. Phys. 127 (2020) 055703; doi: 10.1063/1.5134558.
Wilson Ombati Nyang’au, Andi Setiono, Angelika Schmidt, Harald Bosse, Erwin Peiner, "Sampling and Mass Detection of a Countable Number of Microparticles Using on-Cantilever Imprinting", Sensors 20(9) (2020) 2508; https://doi.org/10.3390/s20092508.
Michael Fahrbach, Sebastian Friedrich, Brunero Cappella, Erwin Peiner, “Calibrating a high-speed contact-resonance profilometer”, J. Sens. Sens. Syst. 9 (2020) 179–187, https://doi.org/10.5194/jsss-9-179-2020.
Min Xu, Zhi Li, Michael Fahrbach, Erwin Peiner, Uwe Brand, “Investigating the trackability of silicon microprobes in high-speed surface measurements”, Sensors 21 (2021) 1557 (13pp); doi: 10.3390/s21051557.
Michael Fahrbach, Sebastian Backes, Heinrich Behle, Min, Xu, Brunero Cappella, Uwe Brand, Erwin Peiner,
"Customized piezoresistive microprobes for combined imaging of topography and mechanical properties",
Measurement: Sensors 15 (2021) 100042 , https://doi.org/10.1016/j.measen.2021.100042; data available.
Journal publications and research reports:
Contributions to international scientific conferences with proceedings:
Andi Setiono, Wilson Ombati Nyang’au, Michael Fahrbach, Jiushuai Xu, Maik Bertke, Hutomo Suryo Wasisto, Erwin Peiner, “Enhancement of unsteady frequency responses of electro-thermal resonance MEMS cantilever sensors”, J. Phys.: Conf. Ser. 1837 (2021) 012003; doi: 10.1088/1742-6596/1837/1/012003
Prabowo Puranto, Qiang Zhang, Wilson O. Nyang’au, Jannick Langfahl-Klabes, Jan Thiesler, Mutaib Zackaria, Zhi Li, Hutomo S. Wasisto, Erwin Peiner, Uwe Brand, "Influence of eccentric nanoindentation on top surface of silicon micropillar arrays”, J. Phys.: Conf. Ser. 1837 (2021) 012008; doi: 10.1088/1742-6596/1837/1/012008
Jiushuai Xu and Erwin Peiner, "Micromachined Silicon Cantilever Resonator-Based Humidity Sensors for Multifunctional Applications”, The 37th IEEE Intern. Conf. Micro Electro Mechanical Systems (MEMS 2021), 25-29 January, DOI: 10.1109/MEMS51782.2021.9375323.
M. Fahrbach, M. Xu, U. Brand und E. Peiner, “Self-excited Contact Resonance Operation of a Tactile Piezoresistive Cantilever Microprobe with Diamond Tip”, SMSI 2021 Conference – Sensor and Measurement Science International, pp. 73 – 74; DOI 10.5162/SMSI2021/A5.4; https://www.ama-science.org/proceedings/details/3948.
M. Fahrbach, W. O. Nyang’au, O. Domanov, C. H. Schwalb, M. Xu, Z. Li, C. Kuhlmann, U. Brand und E. Peiner, “Gedämpfte Silizium Mikrotaster für Hochgeschwindigkeits-Rauheitsmessungen, Damped silicon micro probes for high-speed roughness measurements”, Proc. MikroSystemTechnik Kongress 2021, 8.-10. November 2021, Stuttgart-Ludwigsburg, (VDE-Verlag, Berlin 2021); ISBN: 978-3-8007-5656-8; https://ieeexplore.ieee.org/abstract/document/9698292
Michael Fahrbach, Jiushuai Xu, Petr Klapetek, Jan Martinek, Erwin Peiner, "Contact Resonance Imaging with Vertical Nanowire Arrays", Sensoren und Messsysteme 2022 ∙ 10. – 11.05.2022, Nürnberg, (VDE-Verlag, Berlin, Offenbach, 2022), pp. 245 - 250, ISBN 978-3-8007-5835-7 245; https://ieeexplore.ieee.org/document/9861903.
Andam Deatama Refino, Jiushuai Xu, Jonathan Kottmeier, Andreas Dietzel, Hutomo Suryo Wasisto, Erwin Peiner, “High-aspect-ratio silicon nanowire arrays by cryogenic and chemical etching”, International Workshop on Plasma Cryo Etching Processes (PlaCEP 2022), Orleans, France, 16th to 19th of May 2022, sciencesconf.org:placep:399205; https://hal.archives-ouvertes.fr/hal-03669219/document#page=38.
Frank Eric Anang, Jiushuai Xu, Angelika Schmidt, Markys Cain, Erwin Peiner, “Zinc Oxide Nanowire Arrays Growth on Patterned Silicon Substrate for Piezoelectric Energy Harvesting”, 9. GMM-Workshop “Mikro-Nano-Integration”, RWTH Aachen, 21. – 22. November 2022, (VDE-Verlag, Berlin, Offenbach, 2022), pp. 66 - 70; https://ieeexplore.ieee.org/abstract/document/10025931.
Defang Li, Jinying Zhang, Jiushuai Xu, Erwin Peiner, Zhuo Li, Xin Wang, Suhui Yang, Yanze Gao, “Ultra-Large Pixel Array Photothermal Transducer and its Thermal Performance Prediction Strategy”, Proc. 36th Intern. Conf. Micro Electro Mechanical Systems (IEEE MEMS 2023), Munich, 15 – 19 January 2023 (IEEE, 2023), pp. 1147 - 1150; DOI: 10.1109/MEMS49605.2023.10052516.
Jiushuai Xu, Entian Cao, Michael Fahrbach, Vladislav Agluschewitsch, Andreas Waag, Erwin Peiner, “Real-Time Operation of Microcantilever-based In-plane Resonators Partially Immersed in a Microfluidic Sampler”, Proc. 36th Intern. Conf. Micro Electro Mechanical Systems (IEEE MEMS 2023), Munich, 15 – 19 January 2023 (IEEE, 2023), pp. 1037 – 1040; DOI: 10.1109/MEMS49605.2023.10052263.
Contributions to national scientific conferences:
Patents/Patent applications:
Lectures:
M. Fahrbach, J. Xu, B. Bodermann, Z. Li, U. Brand, J. K. Prüßing, H. Bracht, E. Peiner, “Semiconductor Nanowire Arrays for Energy Harvesting – Fabrication and Characterization”, SOTA Lecture on euspen Special Interest Group (SIG) meeting: Structured & Freeform Surfaces, PTB, Germany, 6-8 October 2020 (invited).
Habilitation:
PhD thesis:
Diploma thesis:
1960 born in Bad Münstereifel, Rhineland
School education:
1966-70 Catholic Elementary School, Antweiler, Kreis Euskirchen
1970-79 High School, Emil-Fischer-Gymnasium Euskirchen
Military service:
1979-80 Pionier-Batallion 610, Lübeck
Academic career:
1980-82 Intermediate Diploma: Physics/Mathematics, University Bonn
1982-85 Diploma: Physics, University Bonn, Elective: Computer Science
1985-88 PhD Dr. rer. nat., University Bonn, Prof. Dr. Konrad Kopitzki
Metastable alloys through ion beam mixing
Minor: Theoretical Chemistry
1986-88 Graduate Scholarship, State of North Rhine-Westphalia
1989-2000 Habilitation, Semiconductor Technol., TU Braunschweig, Univ. of Technology
Silicon sensors for condition monitoring
since 2015 Adjunct professor (außerplanmäßiger Professor)
since 2023 Professor
Professional activities:
1985-88 Scientific student assistant/assistant, University Bonn, Institute for
Radiation and Nuclear Physics
since 1989 Group leader, Academic Director (since 2008), TU Braunschweig
Semiconductor sensors / microsystem technology
1992 Research stay: Inst. f. Semiconductor Physics, Frankfurt (Oder)
Semiconductor metrology
2002 Industry: Volkswagen AG Headquarters, Electron. Res. Div.
Cylinder pressure sensor
Participation in committees:
since 2008 ITG-GMM Technical Committee 4.7 / Progr. Comm. of Workshop
Mikro-Nano-Integration
2009-17 Program Committee of the SPIE conference
Smart Sensors, Actuators and MEMS
2015-17 Co-Chair
2011-16 Board of Trustees of St. Jakobushaus, Goslar, Academy of the
Diocese of Hildesheim
2018 Guest-Editor (with H. S. Wasisto) of Special Issue in mdpi-Sensors
Cantilever Sensor
2021 Guest-Editor (with U. Brand) of Special Issue in mdpi-Sensors
Cantilever Sensors for Industrial Applications
2022 Guest-Editor (with U. Brand) of Special Issue in mdpi-Sensors
Cantilever Sensors for Industrial Applications II
since 2019 Editorial Board Member of mdpi-Sensors, Section: Sensor Materials
since 2020 Editorial Board Member of mdpi-Micromachines, Section E:
Engineering and Technology
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Technische Universität Braunschweig
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38106 Braunschweig
P. O. Box: 38092 Braunschweig
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