Academic Education and Career
1980 ‒ 1986
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Diploma in physics, Georg-August-Universität Göttingen
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1986 ‒ 1989
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PhD (Physics), Georg-August-Universität Göttingen, Supervisor: Prof. Dr. D. Harder
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1989 ‒ 1990
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Postdoc, Institut für Medizinische Physik und Biophysik, Universität Göttingen
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1990 ‒ 1994
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Research Associate and Team Leader of the TEM group, Labor für Oberflächen- und Struktur-Analyse, IBM Microelectronics, Sindelfingen
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1994 ‒ 1996
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Research Associate, IBM Research Division, Zürich Research Laboratory, CH
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1996 ‒ 2003
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Head of Department, Labor für Analytik & Technologie Projekte, IBM Storage Technology Division, Mainz
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2003 ‒ 2004
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Program manager “Basisentwicklung von Beschleunigungssensorik der 3. Generation”, Robert Bosch GmbH, Reutlingen
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2004 ‒ 2011
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Full Professor “Micro and Nano Scale Engineering”, Head of MNSE Section, TU Eindhoven, NL
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2007 ‒ 2011
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Program Manager, Holst Center TNO, Eindhoven, NL
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since 2012
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Director of the Institut für Mikrotechnik, Technische Universität Braunschweig
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2019 - 2021
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Dean of the Fakultät für Maschinenbau, Technische Universität Braunschweig
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Further Activities
2004 ‒ 2008
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Member of the Management Board of “MicroNed” (Dutch consortium for micro-technological research)
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2012 ‒ today
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Member of the Scientific Board of AMA-Fachverband für Sensorik e.V
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Commissioner for the dual-degree program between TU Braunschweig and UT Compiègne as part of the Deutsch-Französische Hochschule (DFH)
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Member of the Management Board of the “Zentrum für Pharmaverfahrenstechnik der TU Braunschweig” since its foundation
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2014 ‒ today
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Speaker of the doctoral program “Processing of Poorly Soluble Drugs at Small Scale” at the PVZ (with H. Bunjes)
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- Reviewer for international scientific journals (including Sensors & Actuators, Journal of Microelectromechanical Systems, Journal of Applied Physics, Applied Physics A and Micro- and Nanofluidics)
- Member of program committees of international scientific conferences (including IEEE MEMS, IEEE Transducers, 3M Nano)
Working Areas
- Laser-Microfabrication
- Thin Films
- MEMS, MEMS fabrication processes ion beam structuring
- Lab-on-chip
- System-in-foil