Modelling Methods in Thin Film Technology

Course content

Intended learning outcome:

Students…...

• can name applications for modeling tasks in surface technology … understand the theoretical basics and numerical modeling methods in surface technology.
• can differentiate multiscale simulations for coating processes from atomistic processes during layer growth.
• understand different physical aspects in thin-film coating processes, which are relevant for modeling.
• can name suitable methods for modeling them.
• can name common and freely available simulation codes from this area.
• apply modeling methods based on selected problems in the areas of gas kinetics, coating processes and layer growth in the context of programming exercises using free software.

Module content:

• Modelling methods for rarefied gas flow and particle transport
• The Boltzmann transport equation and its implications for thermal equilibrium
• Survey on thin film deposition methods at low pressure and their applications
• Monte-Carlo modelling of particle transport and deposition profile
• Ballistic modelling of the sputter rate and energy distribution in sputtering processes
• Global modelling methods of reactive sputtering
• Basic theory of non-thermal plasmas
• Particle-in-Cell modelling of plasmas in 1D
• Atomistic modelling methods for thin film growth: Kinetic Monte Carlo (kMC) and Molecular Dynamics (MD)